Re: High selectivity Si/SiO2 RIE etch

"jialin zhao" <[EMAIL PROTECTED]> schrieb im Newsbeitrag
news:[EMAIL PROTECTED]
> Hi, guys,
> I am looking for a RIE recipe for high selectivity etch betweeen SiO2
> and Si.
> I prefer the selevtivity SiO2:Si> 50:1. the higher the better. Does
> anyone know? Thanks a lot

Hi!

Everything I know now is etching silicon faster than SiO2.
Can't you use wet etching?

Alex