<Deleted - summary: He's looking for stepper output files>
Wouldn't this depend on exactly what kind of stepper (manufacturer,
model, hardware revision, software version, etc) you are interested in?
At least it did when I wrote a Perl program a couple years ago to do
something similar. I had to have the name assigned to the stepper as an
input parameter to the program, then used a look-up table to tell my
program what kind of data the program could expect to see from that
stepper.
For some steppers, the output of the program basically amounted to
"Sorry, that stepper doesn't store any output data."
It seems like a stepper output file for, say, a Nikon body 7 wouldn't do
much good if you're dealing with Canon or ASM steppers.
Or am I totally misunderstanding what you mean by "stepper" and "output
file", as well as what you are trying to accomplish? (I'm assuming
the step-and-repeat lithographic tool used in integrated circuit
fabrication facilities. Further, I'm assuming you're trying to extract
various tool parameters in order to plot and monitor them, looking for
correlations to linewidth and alignment problems.)
