
www.Usenet.com
| <-- __Chronological__ --> | <-- __Thread__ --> |
Hello, I am trying to pattern photoresists on silicon and I am facing some problems and I am hoping that someone might have some suggestions as to how to get rid of them.The photoresist I am using is Shipley S1813 and developer Microposit 351. The processing conditions I am using are as follows: Spin speed 4500 rpm for 30s, softbake at 115 C for 1 min, UV(350-450 nm, 76 mW/cm2)exposure 4 s, developer (undiluted) time 40s. 1. The mask I use is a mesh with square holes 5 micron size and 7.5 micron bar size. After developing I see that only the edges of the square are removed, while in the middle a sqare region of photoresist is still left behind, though of lesser height than the original photoresist thickness. increasing the developing time dissolves the pattern.Can anyone tell me why this is happening and how I can get rid of it. 2. After the developing I want to remove the photoresist completely using acetone, but I am unable to do so, and I believe I should be able to do it. Any reasons why this is not happening? Thanks, Supriya
| <-- __Chronological__ --> | <-- __Thread__ --> |