Re: 950k PMMA in dichloromethane?

Ernie, thanks a lot for your reply.
Dichloromethane is extendely used as PMMA remover after e-beam
lithography process. So I guess if any HCl present due to the
decomposition of dichloromethane won't damage the substrate. What do
you think?
Manuscha

> Dichloromethane will not cut the PMMA chain,  and even if there will be  a
> small amount of HCl generated by the decomposition of dichloromethane, the
> HCl will not cleave the PMMA chain.  But, will the HCl attack your substrate
> or do other damage?
> 
> Regards,
> 
> Ernie