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Re: RF Conductivity of thin Mo film



Peter Simon wrote:
I am very interested in predicting the RF reflection and transmission
(at a frequency of 2.6 GHz) through a thin layer of Molybdenum (Mo)
that may be sputtered onto a 2 mil plastic substrate. The Mo
sputtering process will be very slow: over a cumulative time span of
several thousand hours the thickness will build up to as much as 500
> Angstrom.
  I'm interested in looking at the RF properties as a
function of the thickness of the layer from 0 to 500 Angstrom, and as
a function of temperature from 90 to 400 K.

Are you writing a proposal, or doing design work? I ask because if the former, you have a lot of paper to plow through to find such arcane data. If the latter, you can do some preliminary labwork to narrow things down.


I know how to do the calculation given the value of the conductivity
of Mo: for a thin layer of good conductor the metal can be modeled as
a sheet resistance R = 1/(sigma*t), where sigma is the conductivity
and t is the thickness.  For a thicker layer one can use a more
rigorous transmission line analogy.  However, from browsing the
literature, I've seen that the effective conductivity depends on
several factors, including temperature, film thickness, and the manner
in which the Mo is arranged: single crystal, polycrystalline, or
amorphous.

This deposition is going to occur in a vacuum, due to ion bombardment
of a molybdenum surface, at temperatures that vary over the range of
90 to 400 K.

Elsewhere I suggested you provide a cold finger to collect the Mo before it contaminates your radome; why is that unacceptable?


I have found a paper (R. C. Hansen and W. T. Pawlewicz, "Effective
conductivity and microwave reflectivity of thin metallic films," IEEE
Trans. Antennas Propagat., vol 30, no 11, Nov 1982) that shows how to
calculate the effective conductivity of a thin metallic layer given
the bulk conductivity sigma_0 and the electron mean free path length L
(in the bulk metal).  The calculation is based on earlier work by
Fuchs, Sondheimer, and Campbell.  Hansen and Pawlewicz do not provide
any comparison with measurements, but state that "this model fits
polycrystalline films reasonably well" along with the claim that "most
thin films will be polycrystalline."  They provide an example
calculation for a gold (Au) film, using the values of sigma_0 = 4.1e7
S/m and L = 570 Angstrom, which I assume are both valid at room
temperature, approx. 300 K.

My questions:

<some possible answers interspersed>


1. Should I expect the deposited Mo layer to be polycrystalline, so
that the Hansen/Pawlewicz formulas are valid?  If not, how to proceed?

There doesn't seem to be a lot of info about pure Mo films. But


http://msewww.engin.umich.edu/research/groups/yalisove/publications/impurities_in_Mo/sct132124

and similar papers suggest film structure (both mechanical and chemical) is strongly influenced by substrate temperature, trace gas(es) present, and so on, implying the film structure will change as it deposits unless your radome is a very precisely controlled environment.

You may have to build it and collect some data.

2. What is the electron mean free path length for Mo?  Does this
depend on temperature?

http://adsabs.harvard.edu/cgi-bin/nph-bib_query?1975PhLA...54..229A


3. Is it true that the bulk conductivity of metals is inversely
proportional to temperature over my working range (90K to 400K)?

Got a CRC? Plot some graphs.


4. Any pointers to other useful books or papers?  I have only a
minimal undergraduate EE background in solid state theory from 25
years ago!

No, but an aside; Mo goes superconducting at ~.915K, but many of its compounds (what's your ion source?) do so at much higher temperatures. If the radome is exposed to vacuum it may get cold enough that one or more layers of your film is a superconductor; then things get ugly. Why not prevent the deposition in the first place?


Mark L. Fergerson




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